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SEMICONDUCTOR EQUIPMENT
Data sheet
| OEM | R2D |
| P/N OEM | COMET 3 stations 6in MF |
| OPM | NA |
| P/N OPM | NA |
| SUPPLY VOLTAGE | 110-230 VAC |
| STATUS | AS IS |
More info
missing a sensor | allows the transfer of batches of wafers 6 inch, from cassette to cassette or to boat, according different process: 25 to 25 , 25/25 to 50 , 12/13 to 50
