Manufacturer : C&D Semiconductor Inc.

Base Model: SVG 88-XX

Model 1st track: 1/8838/44/26/36/I

Model 2nd track: 1/8836/44/32MDDD/36/I

Contains the modules Coater, developer, Hotplates, HMDS.

Wafer Size: 150mm

Year of Manufacture: 2007

Condition: Used, 18 years old

Documentation Complete (Available)

Weight Approximately : 500 kg (1,100 lbs)

Dimensions (L x W x H): 2380mmx 910mm x 1100mm