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LAM
Data sheet
| OEM | LAM RESEARCH |
| P/N OEM | 797-98570-209 |
| OPM | UNIT |
| P/N OPM | UFC-1200A |
| RANGE | 20 SCCM |
| GAS | SF6 |
| STATUS | AS IS |
More info
DELIVERED WITH CALIBRATION CERTIFICAT
