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Massflow controllers
Data sheet
| OEM | NOVELLUS |
| P/N OEM | 22-185670-00 |
| OPM | AERA / ADVANCED ENERGY |
| P/N OPM | TC FC-D980C |
| FITTING IN | 1/4 VCR |
| FITTING OUT | 1/4 VCR |
| RANGE | 2 SLM |
| GAS | NH3 |
| STATUS | NEW |
