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Massflow controllers
Data sheet
| P/N OEM | 907484-019 |
| OPM | UNIT |
| P/N OPM | 1260-100067 |
| RANGE | 100 SCCM |
| GAS | 8% PH3/SiH4 |
| STATUS | AS IS |
More info
DELIVERED WITH CALIBRATION CERTIFICAT
