OEM | APPLIED MATERIALS |
P/N OEM | SEE MORE INFO |
OPM | ADVANCED ENERGY |
P/N OPM | SEE MORE INFO |
STATUS | USED |
Available
PN OPM :3155083-151 or PN OEM : 0190-01457
Variable frequency RF plasma generator Frequency range: 1.765 MHz to 2.165 MHz Maximum output power: 5000W Water cooled Generator control via 15-pin analog user port Advanced frequency control parameters available via 9-pin serial interface 208V, 3 phase, 50 / 60 Hz