GENERATOR RF HFV8000

$5,000.00

SC9054

0190-01457

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Availability:In stock-available 3 Weeks for testing

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OEM APPLIED MATERIALS
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PN OPM :3155083-151 or PN OEM : 0190-01457

Variable frequency RF plasma generator Frequency range: 1.765 MHz to 2.165 MHz Maximum output power: 5000W Water cooled Generator control via 15-pin analog user port Advanced frequency control parameters available via 9-pin serial interface 208V, 3 phase, 50 / 60 Hz