Available

Qu: 2 .PN OPM :3155083-151 or PN OEM : 0190-01457

Qu: 1; PN OPM :3155083-108

Variable frequency RF plasma generator Frequency range: 1.765 MHz to 2.165 MHz Maximum output power: 5000W Water cooled Generator control via 15-pin analog user port Advanced frequency control parameters available via 9-pin serial interface 208V, 3 phase, 50 / 60 Hz