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Data sheet
| OEM | LAM RESEARCH |
| P/N OEM | 685-008160-011 |
| OPM | MKS |
| P/N OPM | CMLA-11S02-EMC |
| RANGE | 10 TORR |
| MISCELLANEOUS | Capacitance Diaphragm |
| SUPPLY VOLTAGE | +/-15VDC |
| VOLTAGE OUT | 0-10VDC |
| STATUS | USED |
More info
685-008160-011 VACUUM SENSOR MKS CMLA1102E
