Wafer sytem handling 300mm 200mm

$3,999.20

SC10791

1 Item

Availability:In stock-available

Quantity:

Used

Data sheet

OEM ADE PHASE SHIFT
OPM NEWPORT KENSINGTON
P/N OPM 4000C5
STATUS USED
INSTALLATION POSSIBLE ON ADE PHASE SHIFT

More info

Wafer system handling contain :

Robot PN :11.25 Single arm dual 2V

  • Servo positionning controller PN : 4000C5
  • Carrier 1 position 300mm
  • Carrier 2 positions 200mm
  • 1 PC