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Data sheet
| OEM | NOVELLUS |
| P/N OEM | 52-121902E |
| OPM | NA |
| P/N OPM | NA |
| STATUS | USED |
| INSTALLATION POSSIBLE ON | INOVA C2 |
More info
Ceramic End Effector enable on our website : SC12314 | For cleaning, repair or refurbish please contact us. Depending on the item, we may be able to provide a warranty
