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Data sheet
| OEM | GASONICS / IPC / NOVELLUS |
| P/N OEM | 16783-01 * |
| OPM | NA |
| P/N OPM | NA |
| STATUS | USED |
| INSTALLATION POSSIBLE ON | GASONIC/IPC L-3500 |
More info
* Please note the dimensions and volume of the bulb have been modified and do not correspond exactly to the original reference. This is a modified reference. See dimensions in picture.
