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Miscellaneous
Data sheet
| OEM | GASONICS / IPC / NOVELLUS |
| P/N OEM | 16337-02* |
| OPM | NA |
| P/N OPM | NA |
| STATUS | REFURBISHED |
| INSTALLATION POSSIBLE ON | GASONIC/IPC L-3500 |
More info
Contains part cleaned : 1 Collar PN : 16337-02, 1 Bubbler PN :14738-01, 1 elbow, 3 miscellaneous Plates , 4 miscellaneous pins . As a gift 1 plate and 1 elbow not cleaned.
