New product
OEM | KOKUSAI |
P/N OEM | 4HOT053737 |
OPM | COORSTEK |
P/N OPM | 6621000-66K0288 |
STATUS | NEW |
INSTALLATION POSSIBLE ON | KOKUSAI QUIX Ar anneal furnace |
TPSS-CU Boat -E.V. APPLICATION : Wafer carriers for diffusion and LP-CVD processing. MATERIAL : High-purity silicon impregnated silicon carbide “TPSS”