• The CLEAN TRACK LITHIUS i+ is a 300-mm/200-mm coater/developer designed for technology nodes 45-nm and beyond.The CLEAN TRACK LITHIUS i+ supports a throughput of 150 wafer per hour and features a thermally isolated design that minimizes thermal interference. It comes standard with the core network solution “Ingenio,” a data analysis platform, and allows for full system integration of measurement and inspection tools. The CLEAN TRACK LITHIUS i+ is specifically developed for immersion technology and is suitable for lithography processes such as ArF immersion, ArF, KrF, and i-line.

• Vintage : 2006/04
• Sold AS-IS where is.

• Supplied with spare parts :

VALVE PCS x 2
ULTRASONIC FLOWLITER x 1
FILTER x 1
MANOMETER x 1
FILTER RESIN x 2
FILTER  RESIN x 7
VALVE AMC-VL-X1-DB x 2
DOOR SWITCH x 1
WORKTABLE(N) ASSY x 2
PCB,I/F  PRA (interloc) x 1
Fitting J-R-3 syringe nozzle x 8
IFBS IRAI MODELE B x 1
Air operation valve x 2
Motor IRAI Z x 1
Controller IRA_Z x1 

Wafer size configuration 300mm
Chemicals & gasses introduced Resins, HMDS, EC-Solvent, TMA238, nitrogen.
Non-functional module :  IRAI 5-0 (driver out of order).
Never been used  : module ITC 3-3