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Brooks Wafer Tranfert module 200MM
Brooks Wafer Tranfert module 200MM View larger
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$45,000.00

SC13564

181600-0013 Brooks Wafer Tranfert module 200MM

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1 Item

Availability:In stock-available

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Used

Data sheet

OPM BROOKS
P/N OPM 181600-0013
STATUS USED

More info

Cluster tool 4 sides for 2 process chambers include : 1 Coolstation, 1 aligner 196869, 1 aligner controller 001-4130-15, 1 vacuum robot Magnatran 201600-48-0003, 1 Vacuum Cassette Elevator 188557, 1 Vacuum Cassette 169800-0041, 1 WTM Contoller 233832,and much more, contact us