• HT Platform (main frame with door for safety  and reduced noise, upper frame for Blower and Heat exchanger)
• Wafer size : 200mm
• 2 epitaxial/Polycide chambers ( A,D)
• 1 cool station
• 4 Edwards pumping system (Edwards iXH-1220HTX, QDP80+QMB250, QDP40, other QDP + roots)
• process gas ( SiH4 ; SiH2Cl2 ; TiCl4 ; GeH4 ; SiH3CH3 ; B2H6 ; PH3, HCl, CH4, H2.
• Vintage 1995

 Condition: 

 Complete, functional when it was stopped. Requires reconditioning/cleanning. Gas purged. Pumping to be refurbished.

 Sold as-is where is

 Very attractive price, contact us.