CONTAINS HORIBA MFC : SEC-F730M A1 ARGON 300SCCM X 1 | SEC-F730M A1 NH3 2 SLM X1 | SEC-F730M A1 ARGON 1,5 SLM X 1| SEC-F740M A1 CLF3 1SLM X1 |SEC-F730M AR 1 SLPM X1 / VALVE FUJIKIN 091539 X 10 | VERIFLO VALVE SQMICROHF502PUPG6010 X 4 | FUJIKIN VALVE 070930 X 4 |SENSOR HYPFU-ND420P-S1 | MILLIPORE FILTER WG2S01WW2